M65 |
Micro Electro Mechanical Systems [Електронний ресурс] / edit. Qing-An Huang. – Electronic text data. – Springer, 2018.
The acronym for micro electro mechanical systems (MEMS) was worldwide
adopted in 1989. Since then, we have witnessed an increasing maturity of the
MEMS industry and a rapid introduction of new products addressing applications
ranging from smartphones, automobiles, aerospace, electronics instrumentation,
industrial process control, appliances, biotechnology, healthcare, office equipment,
and telecommunications to Internet-of-Things. MEMS devices and microsystems
are now found everywhere. |