This book intends to close that gap by providing theoretical background and experimental and fabrication methods in one comprehensive text. This is well suited for engineers and physicists to be able to design, fabricate, and characterize terahertz metamaterial devices in commercial planar semiconductor processes. Three case studies are covered in detail involving terahertz modulator and detector implemented in commercial gallium arsenide (GaAs) and complementary metal-oxide semiconductor (CMOS) process for imaging and communication applications.